The best Side of Noohapou
The best Side of Noohapou
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distant Locations: Static models are generally positioned remotely, rising Charge and lowering In general system effectiveness.
thirty% of its peak energy usage, supplying our buyers important reduction in functioning charges and improved trustworthiness.
the data underneath is categorized by semiconductor procedure and Software company. Every desk incorporates an Applications Matrix that reveals qulified and commercial procedures.
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This exceptional system, offering a small variety element, inexpensive-of-possession and Dynamic Temperature Control presented system and machines engineers a completely new Resource to improve their temperature delicate procedures.
The accuracy of the POU 3300 permits independent Charge of the process fluid temperature for the wafer chuck in just +/- 0.1 °C of set stage, as well as quickly reaction time with the program makes it possible for for optimum wafer-to-wafer repeatability through the entire etch course of action.
All static TCUs demand excessive cooling & heating capacities due to their quite big approach fluid reservoirs. the method fuid reservoir on LAUDA-Noah's dynamic temperature control procedure is lower than one gallon.
While using the POU3300, you'll be able to reach unparalleled leads to etch functionality, chamber uptime, diminished cost of ownership and fab Area utilization – all though increasing your approach trustworthiness.
The data pertains into a 300mm chamber temperature profile throughout a substantial element ratio Etch system, working at really large RF electric power disorders (~three.8kW). The powerful elements of this facts set are:
LAUDA-Noah is Assembly these new difficulties and has incorporated Strength saving technologies in devices which are friendly towards the ecosystem and possess a low cost to work.
the info established Here's from the 200mm quantity production wafer fab and Plainly illustrates the good thing about the LAUDA-Noah POU technique.
over ever, shrinking unit geometries, demanding new procedures in addition to a really competitive environment involve temperature Management units that Merge rapidly and exact temperature control using an emphasis read more on diminished working expenditures and improved trustworthiness.
verified; TEs' symbolize only one Portion of a chiller's style and design. The switching & Management techniques utilized by a chiller will affect the TEs' trustworthiness.
(for that reason, setting up a static unit close to chamber will not likely empower it to deliver dynamic temperature Command)
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